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MEMS Bibliography

Non-Inertial Sensors

NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe's Web Site.

 

Piezoresistive sensing of bistable micro mechanism state, Anderson, J.K., Howell, L.L., Wittwer, J.W., and McLain, T.W., 2006, Journal of Micromechanics and Microengineering, Vol. 16, pp. 943-950.

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor, William P. Eaton, Fernando Bitsie, James H. Smith, David W. Plummer, to be published at the International Conference on Modeling and Simulation of Microsystems, MSM 99, April 19-21, 1999.

Copyright © 2000 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications. I Accept.

Polycrystalline-Silicon Microbridge Combustible Gas Sensor, Ph.D. dissertation, University of New Mexico, 1997.

Comparison of Bulk- and Surface-Micromachined Pressure Sensors, William P. Eaton, James H. Smith, David J. Monk, Gary O'Brien, and Todd F. Miller, Presented at the SPIE Proceedings, Santa Clara, CA, September 21-22, 1998, Vol. 3514, pp. 471.

Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept

Surface Micromachined Pressure Sensors, William P. Eaton, Ph.D. dissertation, University of New Mexico, 1997.

Selective, pulsed CVD of platinum on microfilament gas sensors, R.P. Manginell, J.H. Smith, A.J. Ricco, D.J. Moreno, R.C. Hughes, R.J. Huber and S.D. Senturia, Tech. Digest 1996 Sol.-State Sensor and Actuator Workshop, Hilton Head Isl., SC, June 1996.

Surface Micromachined Sensors and Actuators, J. J. Sniegowski, Micro-integrated Smart Material and Structures Conference (MISMSC), Society for Experimental Mechanics, Williamsburg, VA, Oct. 11-12, 1995, pp. 100-110.

Planar Surface-Micromachined Pressure Sensor with a Sub-Surface, Embedded Reference Pressure Cavity, W.P. Eaton and J.H. Smith, Micromachined Devices and Components, Proceedings of the SPIE, Vol 2882, pp. 259-265(October 1996).

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electroniccopy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept

A CMOS-compatible, surface-micromachined pressure sensor for aqueous ultrasonic application, W.P. Eaton and J.H. Smith, Smart Structures and Materials 1995, Proceedings of the SPIE, 2448, pp. 258-265 (March 1995).

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept

Characterization of a Surface Micromachined Pressure Sensor Array, W.P. Eaton, J.H. Smith, Micromachining and Microfabrication Symposium, Proceedings of the SPIE, Vol 2642, pp. 256-264(October 23-24, 1995).

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept

Planar Surface-Micromachined Pressure Sensors by Chemical-Mechanical Polishing, W.P. Eaton and J.H. Smith, Micromachining Workshop II, (September, 1996).

Selective, Pulsed CVD of Platinum on Microfilament Gas Sensors, R. Manginell, J. Smith, A. Ricco, R. Hughes, R. Huber, and S. Senturia, Proc. Solid-State Sensor and Actuator Workshop, pp. 23-27, Jun. 1996.

Characterization of a Surface Micromachined Pressure Sensor Array, W. Eaton and J. Smith, SPIE Micromachining and Microfabrication `95, vol. 2642, pp. 256-264, Oct. 1995.

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.I Accept

Self-Consistent Temperature Compensation for Resonant Sensors with Application to Quartz Bulk Acoustic Wave Chemical Sensors, J. Smith and S. Senturia, Proc. Transducers' 95, vol. 2, pp. 724-727, Jun. 1995.

Copyright © 1995 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

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