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Sandia MEMS Patents

Erected Mirror Optical Switch, U.S. Patent No. 6,903,861, issued 6/7/2005.

Microelectromechanical Mirrors and Electrically-Programmable Diffraction Gratings Based on Two-Stage Actuation, U.S. Patent No. 6,967,757, issued 11/22/2005.

Planar-Constructed Spatial Micro-Stage, U.S. Patent No. 6,675,671, Issued 01/13/2004.

Micromechanical Apparatus for Measurement of Forces, U.S. Patent No. 6,739,201, issued 5/25/2004.

Surface-Micromachined Microfluidic Devices, U. S. Patent No. 6,797,187, issued 9/28/2004.

Surface Micromachined Microfluidic Devices, U.S. Patent No. 6,537,437, Issued 03/25/2003.

Microelectromechanical Dual-Mass Resonator Structure, U.S.Patent No. 6,393,913, issued May 28, 2002.

Surface Micromachined Counter meshing Gears Discrimination Device, U.S.Patent No. 6,158,297, issued 12/12//2000.

Mechanical Reciprocating Tooth Indexing Apparatus , U.S.Patent No. 5,959,376, issued 9/28/1999.

Contact MEMS at Sandia: memsinfo@sandia.gov

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