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MEMS Bibliography

Measurement, Characterization, Modeling and Reliability

NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe's Web Site.

 

Growth of silicon carbide nanoparticles using tetraethylorthosilicate for microelectromechanical systems, DelRio, FW; Dunn, ML; de Boer, MP, 2007, Electrochemical and Solid-State Letters, Vol. 10, No. 1, p.H27-H30
Abstract and PDF

Micromachined piconewton force sensor for biophysics investigations, Koch, SJ; Thayer, GE; Corwin, AD; de Boer, MP, 2006, Applied Physics Letters, Vol. 89, No. 17, p.173901-1-3
Abstract and PDF.

Robust Design and Model Validation of Nonlinear Compliant Micromechanisms, Wittwer, J.W., Baker, M.S., and Howell, L.L., 2006, Journal of Microelectromechanical Systems, Vol. 15, No. 1, pp. 33-41.
Abstract and PDF

The effect of nanoparticles on rough surface adhesion, F. W. Delrio, M. L. Dunn, B. L. Boyce, A. D. Corwin and M. P. de Boer, J. Appl. Phys. 99, 104304 (2006).
Abstract and PDF

In-situ wear studies of surface micromachined interfaces subject to controlled loading, E. E. Flater, A. D. Corwin, M. P. de Boer, and R. W. Carpick, Wear, 260 (6) 580 (2006).
Abstract and PDF

Long Working-Distance Incoherent Light Interference Microscope, M. B. Sinclair, M. P. de Boer and A. D. Corwin, Applied Optics, 44 (36) 7714-7721 (2005)
Abstract and PDF

Accelerating Aging Failures in MEMS Devices Danelle M. Tanner, Jeremy A. Walraven, Michael T. Dugger, Ted B. Parson, Sam A. Candeleria, Mark W. Jenkins, Alex D. Corwin, James A. Ohlhausen, and Elizabeth M. Huffman, Proceedings of the 43rd International Reliability Physics Symposium, 2005, pp 317-324.

Copyright © 2005 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Role of van der Waals forces in adhesion of micromachined surfaces, F. W. DelRio, M. P. de Boer, J. A. Knapp, E. D. Reedy, P. J. Clews and M. L. Dunn, Nature Materials 4 (8) 629-634 (2005).
Abstract and PDF

Effect of adhesion on dynamic and static friction in surface micromachining, A. D. Corwin and M. P. de Boer, Applied Physics Letters, 84 (13) 2451 (2004).
Available Online

An investigation of sidewall adhesion in MEMS, W. R. Ashurst, M. P. de Boer, C. Carraro, and R. Maboudian, Applied Surface Science, 212-213 735 (2003).
Abstract and PDF

MEMS structures for on-chip testing of mechanical and surface properties of thin films, R. Ballarini, H. Kahn, A. H. Heuer, M. P. de Boer, and M. T. Dugger, in Interfacial and Nanoscale Failure, Comprehensive Structural Integrity Series, W.W. Gerberich and W. Yang, Editors. 2002, Elsevier: Oxford. (2003).

On-Chip Monitoring of MEMS Gear Motion Danelle M. Tanner, Scot E. Swanson, Jeremy A. Walraven, and Jeffrey L. Dohner, Proceedings of IRPS, 2003, pp. 484-490.

Copyright © 2003 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Resonant Frequency Method for monitoring MEMS fabrication Danelle M. Tanner, Albert C. Owen, and Fredd Rodriguez, SPIE’s 2003 Reliability, Testing, Characterization of MEMS/MOEMS II Proceedings, Vol.4980,, San Jose, pp. 220-228.

Copyright © 2003 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Anodic Oxidation-Induced Delamination of the SUMMiTTM Poly 0 to Silicon Nitride Interface Richard A. Plass, Jeremy A. Walraven, Danelle M. Tanner, and Fredrick W. Sexton, SPIE’s 2003 Reliability, Testing, Characterization of MEMS/MOEMS II Proceedings, Vol.4980, San Jose, pp. 81-86.

Copyright © 2003 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Wear Mechanisms in a Reliability Methodology Danelle M. Tanner and Michael T. Dugger, SPIE’s 2003 Reliability, Testing, Characterization of MEMS/MOEMS II Proceedings, Vol.4980, San Jose, pp. 22-40.

Copyright © 2003 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces, J. A. Knapp and M. P. de Boer, Journal of Microelectromechanical Systems, 11 (6) 754 (2002).
Abstract

Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed-fixed beams, M. S. Baker, M. P. de Boer, N. F. Smith, L. K. Warne, and M. B. Sinclair, Journal of Microelectromechanical Systems, 11 (6) 743 (2002).
Abstract


Pin-Joint Design Effect on the Reliability of a Polysilicon Microengine, Danelle M. Tanner, Jeremy A. Walraven, Seethambal S. Mani, and Scot E. Swanson, Proceedings of IRPS, 2002, pp. 122-129.

Copyright © 2002 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

A 2D Visualization Tool for SUMMiT V™ Designs, Presented at the Fourth International Conference on Modeling and Simulation of Microsystems, March 19-21, 2001, Hilton Head Island, CS, pp 606-609.

Copyright © 2001 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications.  I Accept.

Non-Destructive Resonant Frequency Measurement on MEMS Actuators, N. F. Smith, D. M. Tanner, S. E. Swanson, S. L. Miller, Proceedings of IRPS, 2001, pp. 99-105.

Copyright © 2001, Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Integrated platform for testing MEMS mechanical properties at the wafer scale by the IMaP™ methodology, in Mechanical properties of structural thin films, Special Technical Publication (STP) No. 1413; accepted, edited by S. B. Brown and C. L. Muhlstein (ASTM, West Conshohocken, PA, 2002).

Interferometry of actuated microcantilevers to determine material properties and test structure non-idealities in MEMS, B. D. Jensen, M. P. de Boer, N. D. Masters, F. Bitsie and D. A. LaVan, J. Microelectromech. Syst. Vol. 10, No. 3, pp. 336-346 (2001).

Copyright © 2001 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

Tribology of MEMS, MRS Bull. 26 (4), 302 (2001). M. P. de Boer and T. M. Mayer,

Copyright © 2001, The Materials Research Society. All rights of copyright are retained by the author and other copyright holders. This information may be copied for personal use but cannot be otherwise distributed or reposted to another electronic server for general retrieval without permission of the copyright holder.  I Accept.

Effect of nanotexturing on interfacial adhesion in MEMS, M. P. de Boer, J. A. Knapp and P. J. Clews, International Conference on Fracture, Honolulu, HI, accepted (2001).

Reliability of a MEMS Torsional Ratcheting Actuator, Danelle M. Tanner, Jeremy A. Walraven, Stephen M. Barnes, Norman F. Smith, Fernando Bitsie, and Scot E. Swanson, Proceedings of IRPS, 2001, pp. 81-90.

Copyright © 2001 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

A 3D Geometry Modeler for the SUMMiT VTM; MEMS Designer, C.R. Jorgensen and V.R. Yarberry, presented at the Fourth International Conference on Modeling and Simulation of Microsystems (MSM 2001), Hilton Head, South Carolina, March 19 - 21, 2001.

Copyright © 2001 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications.  I Accept.

Measurement of Residual Stress in MEMS to Sub Megapascal Accuracy, M.S. Baker, M.P. de Boer, N.F. Smith, M.B. Sinclair, to be presented at the Society for Experimental Mechanics Annual Conference and Exposition, Portland, OR, June 4-6, 2001.

The influence of coating structure on micromachine stiction, J. G. Kushmerick, M. G Hankins, M. P. de Boer, P. J. Clews, R. W. Carpick, and B. C. Bunker, Tribol. Lett., 10 (1-2) 103 (2001).
Abstract and PDF

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes, D. M. Tanner, N. F. Smith, L. W. Irwin, W. P. Eaton, K. S. Helgesen, J. J. Clement, W. M. Miller, J. A. Walraven, K. A. Peterson, P. Tangyunyong, M. T. Dugger, S. L. Miller, Sandia Report, SAND2000-0091, Unlimited Release, Printed January 2000.

Adhesion Hysteresis of Silane Coated Microcantilevers, M. P. de Boer, J. A. Knapp, T. A. Michalske, U. Srinivasan, R. Maboudian, Acta mater. 48, (18-19) 4531 (2000).
Abstract and PDF

The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers, B.C. Bunker, R.W. Carpick, R.A. Assink, M.L. Thomas, M.G. Hankins, J.A. Voigt, D. Sipola, M.P. de Boer, G.L. Gulley, Langmuir 2000, 16, 7742-7751.

MEMS Reliability in a Vibration Environment, D. M. Tanner, J.A. Walraven, K.S. Helgesen, L. W. Irwin, D.L. Gregory, J.R. Stake, N. F. Smith, Proceedings of IRPS, 2000, pp. 129-138.

Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

MEMS Reliability in Shock Environments, D. M. Tanner, J.A. Walraven, K.S. Helgesen, L. W. Irwin, F. Brown, N. F. Smith, N. Masters, Proceedings of IRPS, 2000, pp. 139-145.

Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Development of characterization tools for reliability testing of MicroElectroMechanical system actuators, N. F. Smith, W.P. Eaton, D.M. Tanner, J.J. Allen, Paper presented at MEMS Reliability for Critical and Space Applications, SPIE Proceedings, Santa Clara, CA, September 21-22, 1999, Vol. 3880, pp. 156-164.

Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Interferometric measurement for improved understanding of boundary effects in micromachined beams, B. D. Jensen, F. Bitsie, M. P. de Boer, Paper to appear at Micromachining and Microfabrication Conference, SPIE Vol. 3875, Santa Clara, CA, Sept. 20-22, 1999.

Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

A small area in-situ MEMS test structure to measure fracture strength by electrostatic probing, M. P. de Boer, B. D. Jensen, F. Bitsie, Paper in SPIE Proceedings, v. 3875, Materials and Device Characterization in Micromachining, Santa Clara, CA Sept. 1999.

Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Supercritical Carbon Dioxide Extraction of Solvent from Micromachined Structures, E.M. Russick, C.L.J. Adkins, C.W. Dyck, ACS Symposium Series; 1997; v.670, p.255-269.

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Accurate Method For Determining Adhesion of Cantilever Beams , M. P. de Boer and T.A. Michalske, Published in the Journal of Applied Physics, July 15, 1999, Volume 86, pp. 817-827.
Abstract and PDF


The Role of Interfacial Properties on MEMS Performance and Reliability, M. P. de Boer, J.A. Knapp, T.M. Mayer and T.A. Michalske, Invited paper for SPIE/EOS Conference on Microsystems Metrology and Inspection, Munich, June 15, 1999.

Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

IMaP™: Interferometry for Material Properties Measurement in MEMS, Brian D. Jensen, Maarten P. de Boer, and Sam L. Miller, Presented at Modeling and Simulation of Microsystems 1999, San Juan, Puerto Rico, April 19-21, 1999, pp. 206-209.

Copyright © 1999 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications.  I Accept.

The Effect of Humidity on the Reliability of a Surface Micromachined Microengine, D. M. Tanner, J. A. Walraven, L. W. Irwin, M. T. Dugger, N. F. Smith, W. M. Miller, and S. L. Miller, Proc. Of IEEE International Reliability Physics Symposium, 1999, pp. 189-197.

Copyright © 1999 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Adhesion, Adhesion Hysteresis and Friction in MEMS Under Controlled Humidity Ambients, M.P. de Boer, J.A. Knapp, J.M. Redmond, T.A. Michalske, R. Maboudian, Presented at the ASME IMECE conference in Anaheim, CA, Symposium on Microscale Mechanics of Materials and Structures, Nov. 1998.

A Hinged-pad Test Structure for Sliding Friction Measurement in Micromachining, Maarten P. de Boer, Jim M. Redmond and Terry A. Michalske, Published in the SPIE Proceedings, Materials and Device Characterization in Micromachining, Santa Clara, CA, Vol. 3512, Sept. 1998, pp. 241-250.

Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients, M. P. de Boer, P. J. Clews, B. K. Smith and T. A. Michalske, Presented at the Materials Research Society Proceedings, San Francisco, CA, Symposium on Microelectromechanical Structures for Materials Research, April 15-16, 1998, Vol. 518, pp. 131-136.

Copyright © 1998, The Materials Research Society. All rights of copyright are retained by the author and other copyright holders. This information may be copied for personal use but cannot be otherwise distributed or reposted to another electronic server for general retrieval without permission of the copyright holder.  I Accept.

Measuring and Modeling Electrostatic Adhesion in Micromachines, M. P. de Boer, M. R. Tabbara, M. T. Dugger, P. J. Clews and T. A. Michalske, Presented at the Transducers 1997 Meeting, Chicago, IL, June 16-19, 1997.

Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

A Performance Analysis System for MEMS using Automated Imaging Methods, Glenn F. LaVigne and Sam L. Miller, Presented at the 1998 Proceedings, IEEE International Test Conference, Washington DC, Oct. 18-23, 1998, pp. 442-447.

Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Characterization Techniques for Surface-Micromachined Devices, William P. Eaton, Norman F. Smith, Lloyd Irwin, and Danelle M. Tanner, Presented at the Micromachined Devices and Components IV, SPIE Proceedings, Santa Clara, CA, September 21-22, 1998, Vol. 3514, pp. 171-178.

Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Failure Analysis of Surface-Micromachined Microengines, Kenneth A. Peterson, Paiboon Tangyunyong, and Alejandro A. Pimentel, (Invited presentation and paper), Presented at the Materials and Device Characterization in Micromachining Symposium, Santa Clara, CA, September 21-22, 1998, Vol. 3512, pp. 190-200.

Linkage Design Effect on the Reliability of Surface Micromachined Microengines Driving a Load, Danelle M. Tanner, Kenneth A. Peterson, Lloyd W. Irwin, Paiboon Tangyunyong, William M. Miller, William P. Eaton, Norman F. Smith, and M. Steven Rodgers, Presented at the Micromachining and Microfabrication Symposium, September, 21-22, 1998, Santa Clara, CA, Proceedings of SPIE, Vol. 3512, pp. 215-226.

Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

MEMS Reliability: The Challenge and the Promise, William M. Miller, Danelle M. Tanner, Samuel L. Miller, Kenneth A. Peterson, (Invited presentation and paper) 4th Annual "The Reliability Challenge," Dublin, Ireland, May 19, 1998, pp. 4.1-4.7.

Configuration Space Representation for Micro-Mechanism Function, J J. Allen, E. Sacks, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Failure Modes in Surface Micromachined MicroElectroMechanical Actuators, S. L. Miller, M. S. Rodgers, G. LaVigne, J. J. Sniegowski, P. Clews, D. M. Tanner, and K. A. Peterson, Presented at the 1998 IEEE International Reliability Physics Symposium Proceedings, IRPS 1998, March 31-April 2, 1998, pp. 17-25.

Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept

Applying Macro Design Tools to the Design of MEMS Accelerometers, Brady R. Davies, M. Steven Rodgers, and Stephen Montague, Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 3-7, 1998, pp. 46-55.

Copyright © 1998 Instrument Society of America. This paper is available as an electronic reprint with permission of ISA. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

Designing and Operating Electrostatically Driven Microengines, M. Steven Rogers, Jeffry J. Sniegowski, Samuel Miller, Glenn F. LaVigne, Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 3-7, 1998, pp. 56-65.

Copyright © 1998 Instrument Society of America. This paper is available as an electronic reprint with permission of ISA. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

The Effect of Frequency on the Lifetime of a Surface Micromachined Microengine Driving a Load, Danelle M. Tanner, William M. Miller, William P. Eaton, Lloyd W. Irwin, Ken A. Peterson, Michael T. Dugger, Donna C. Senft, Norman F. Smith, Paiboon Tangyunyong, and Samuel L. Miller, 1998 IEEE International Reliability Physics Symposium Proceedings, March 30 - April 2, 1998, pp. 26-35.

Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Dynamic Effects of Linkage Joints in Electrostatic Microengines, J. J. Allen, S. L. Miller, G. F. LaVigne, M. S. Rodgers, Presented at Modeling and Simulation of Microsystems 1998, Santa Clara, CA, April 6-8, 1998.

Copyright © 1998 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications.  I Accept.

First Reliability Test of a Surface Micromachined Microengine Using SHiMMeR, D. M. Tanner, N. F. Smith, D. J. Bowman. W. P. Eaton, and K. A Peterson, Presented at the 1997 Symposium on Micromachining and Microfabrication, September 29, Austin, TX. Proceedings of SPIE, Volume 3224, pp. 14-23, 1997.

Copyright © 1997 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Routes to failure in rotating MEMS devices experiencing sliding friction, S. L. Miller, G. LaVigne, M. S. Rodgers, J. J. Sniegowski, J. P. Waters, and P. J. McWhorter, Proc. SPIE Micromachined Devices and Components III Vol. 3324, Austin, Sept. 29-30, 1997, pp. 24-30.

Copyright © 1997 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process, J. H. Comtois, M. A. Michalicek, and C. C. Baron, (Invited Paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 769-772.

Copyright © 2002 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Prediction of Release-Etch Times for Surface-Micromachined Structures, W. P. Eaton, R. L. Jarecki, and J. H. Smith, (Invited paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 1, pp. 249-252.

Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Friction in Surface Micromachined Microengines, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Smart Electronics and MEMS Vol. 2722, San Diego, Feb. 28-29, 1996, pp. 197-204.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

Performance Tradeoffs for a Surface Micromachined Microengine, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Micromachined Devices and Components Vol. 2882, Austin, Oct. 14-15, 1996, pp. 182-191.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Characterization of a Surface Micromachined Pressure Sensor Array, W.P. Eaton, J.H. Smith, Micromachining and Microfabrication Symposium, Proceedings of the SPIE, Vol 2642, pp. 256-264(October 23-24, 1995).

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

Release-etch modeling for complex surface micromachined structures, W.P. Eaton, J.H. Smith, and R.L. Jarecki, Micromachining and Microfabrication Symposium, Proceedings of the SPIE, Vol 2879, pp. 80-93 (October 1996).

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Supercritical Carbon Dioxide Drying of Surface-Micromachined Micromechanical Structures, C. Dyck, J. Smith, E. Russick, and C. Adkins, SPIE vol. 2879, Oct. 1996.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
I Accept.

Characterization of the Embedded Micromechanical Device Approach to the Monolithic Integration of MEMS with CMOS, J. Smith, S. Montague, J. Sniegowski, R. Manginell, P. McWhorter, and R. Huber, SPIE vol. 2879, Oct. 1996.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Diffusion-Limited Release-Etch Rate Modeling for Complex Surface Micromachined Structures, W. Eaton, J. Smith, and R. Jarecki, SPIE vol. 2879, Oct. 1996.

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

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