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MEMS Bibliography

Integrated Technology; Inertial Sensors

NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe's Web Site.

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive using a Progressive Linkage, J. R. Bronson, G. J. Wiens, J. J. Allen, DETC2005-84217, ASME 2005 International Design Engineering Technical Conferences, September 24-28, 2005, Long Beach, CA.

Shaped Comb Fingers for Tailored Electro-Mechanical Restoring Force, B. Jensen, S. Mutlu, S. Miller, K. Kurabayashi, J. Allen, JMEMS, Vol. 12, No. 3, June 2003.

Out-of-plane, rotary micromirrors for reconfigurable photonic applications, Dagel, DJ; Spahn, OB; Allen, JJ; Kemme, SA; Grossetete, GD; Gass, FR, Proceedings of the SPIE, vol.4983, p.114-21, 2003.

MEMS Shutters for Spacecraft Thermal Control, R. Osiander, J. Champion, A. Darrin, D. Douglass, T. Swanson, J. Allen, E. Wyckoff, NanoTech 2002, Houston, Texas. 9-12 September 2002.

Analyst Perspective: The Coming Revolution in ICs: Intelligent, Integrated Microsystems, A. D. Romig, Jr., J. H. Smith, SEMI Executive Summary Report, Third Quarter 1997, pp. 45-47.

Intelligent Microsystems: Strategy for the Future, J. H. Smith, J. J. Sniegowski, P. J. McWhorter, A. D. Romig Jr., April 1998 Issue of Semiconductor International, pp. 93-98.

Surface-Micromachined 1MHz Oscillator with Low-Noise Pierce Configuration, T. A. Roessig, R. T. Howe, and A. P. Pisano; UC Berkeley, and J. H. Smith; Sandia National Laboratories, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8-11, 1998.

Integrated Micro-Electro-Mechanical Sensor Development for Inertial Applications, J. J. Allen, R. D. Kinney, J. Sarsfield, M. R. Daily, J. R. Ellis, J. H. Smith, S. Montague, Sandia National Laboratories; R. T. Howe, B. E. Boser, R. Horowitz, and A. P. Pisano, Berkeley Sensor Actuator Center; and M. A. Lemkin, W. A. Clark, T. Juneau, Integrated Micro Instruments. Presented at the Position Location and Navigation Symposium (PLANS '98), Rancho Mirage, CA, April 20-23, 1998.

Surface-Micromachined Resonant Accelerometer, T. A. Roessig, R. T. Howe, A. P. Pisano, and J. H. Smith, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 859-862.

Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass, M. A. Lemkin, B. E. Boser, D. Auslander, and J. H. Smith, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 1185-1188.

Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Chemical Mechanical Polishing: Enhancing the Manufacturability of MEMS, J. J. Sniegowski, (Invited paper) SPIE Micromachining and Microfabrication Process Technology, Austin, TX, Oct. 14, 1996, Vol. 2879, pp. 104-115.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Surface Micromachined Sensors and Actuators, J. J. Sniegowski, Micro-integrated Smart Material and Structures Conference (MISMSC), Society for Experimental Mechanics, Williamsburg, VA, Oct. 11-12, 1995, pp. 100-110.

A Three-Axis Surface Micromachined Sigma-Delta Accelerometer, M. Lemkin, M. Ortiz, N. Wongkomet, B. Boser, and J. Smith, Proc. ISSCC, pp. 202-203, Feb. 1997.

Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Characterization of the Embedded Micromechanical Device Approach to the Monolithic Integration of MEMS with CMOS, J. Smith, S. Montague, J. Sniegowski, R. Manginell, P. McWhorter, and R. Huber, SPIE vol. 2879, Oct. 1996.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices, R. Nasby, J. Sniegowski, J. Smith, S. Montague, C. Barron, W. Eaton, P. McWhorter, D. Hetherington, C. Apblett, and J. Fleming, Proc. Solid-State Sensor and Actuator Workshop, pp. 48-53, Jun. 1996.

Micromachined Sensor and Actuator Research at Sandia's Microelectronics Development Laboratory, J. Smith, Invited Presentation, Proc. Sensors Expo Anaheim '96, pp. 119-123, April, 1996.

Embedded Micromechanical Devices for the Monolithic Integration of MEMS with CMOS, J. Smith, S. Montague, J. J. Sniegowski, J. R. Murray, and P. J. McWhorter, IEDM Tech. Digest, pp. 609-612, Dec. 1995. 

Copyright © 1995 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Material and Processing Issues for the Monolithic Integration of Microelectronics with Surface-Micromachined Polysilicon Sensors and Actuators. J. Smith, S. Montague, and J. Sniegowski, SPIE Micromachining and Microfabrication `95, vol. 2639, pp. 64-73, Oct. 1995.

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

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