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MEMS Bibliography

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NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe's Web Site.


Micro Electro Mechanical System Design , J. J. Allen, CRC Press, ISBN 0-8247-5824-2, 2005.

Chapter 3, Microsystem Fabrication Technologies, J. J. Allen, Micro Electro Mechanical Systems and Microstructures in Aerospace Applications , R. Osiander, A. Darrin, J. Champion, editors, CRC Press, ISBN 0-8247-2637-5, 2005.

Meeting the MEMS 'Design-to-Analysis' Challenge: the SUMMiT V™ Design Tool Environment, Victor R. Yarberry, Presented at the ASME International Mechanical Engineering Congress, November 17-22, 2002, New Orleans, LA.

Side-by-side comparison of passive MEMS strain test structures under residual compression, N. D. Masters, M. P. de Boer, B. D. Jensen, M. S. Baker, and D. Koester, in Mechanical properties of structural thin films, STP 1413, S. B. Brown and C. L. Muhlstein, Editors. 2001, ASTM: West Conshohocken, PA. pp. 168-200.

Integrated platform for testing MEMS mechanical properties at the wafer scale by the IMaP methodology, M. P. de Boer, N. F. Smith, N. D. Masters, M. B. Sinclair, and E. J. Pryputniewicz, in Mechanical properties of structural thin films, STP 1413, S. B. Brown and.C.L. Muhlstein, Editors. 2001, ASTM: West Conshohocken, PA. p. 85-95.

Microsystems challenges for engineering education, Allen, J. J., ASME IMECE Proceedings 2001; vol.2, p.707-710, Nov 11-16 2001.

Materials Science of Microelectromechanical Systems (Mems) Devices III, H. Kahn, M. de Boer, M. Judy, and S. M. Spearing, eds., Mater. Res. Soc. Proc. Vol. 657. 2001, Materials Research Society: Warrendale, PA.

A 2D Visualization Tool for SUMMiT V™ Designs, Presented at the Fourth International Conference on Modeling and Simulation of Microsystems, March 19-21, 2001, Hilton Head Island, CS, pp 606-609.

Copyright © 2001 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications.  I Accept.

The Visionary's Dilemma, Steve Walsh, David R. Myers, Carol W. Sumpter, and Jerome Jakubczak II, SEMICON Southwest 2001. SEMI Technology Symposium (STS) MEMS/MST Technology: The Second Micro-Manufacturing Revolution. October 15, 2001. Austin TX. The paper was printed on pp.89-94.

NSF 2000 Workshop on Manufacturing of Micro-Electro-Mechanical Systems, A. Tseng, W. C. Tang, Y. C. Lee, and J. J. Allen, Journal of Materials Processing and Manufacturing Science, Vol. 8, No. 4, pp. 292-360,April 2000.

IC-compatible polysilicon surface micromachining, J. J. Sniegowski and M. P. de Boer, Annu. Rev. Mater. Sci., 30 297 (2000).

Implications of Intelligent, Integrated Microsystems for Product Design and Development, David R. Myers, Paul J. McWhorter, C. Converse, and L. A. Makal, Proceedings of IEMC-2000, [IEEE Engineering Management Society International Engineering Management Conference, 2000 "Leading Technology Change: Management Issues and Challenges"] IEEE Catalog Number 00CH37139, ISBN 0-7803-6443-0, IEEE Press, Piscataway NJ, 2000. pp.325-330.

Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Implications of Intelligent, Integrated Microsystems for Product Design and Development, David R. Myers, Paul J. McWhorter, C. Converse, and L. A. Makal, Proceedings of IEMC-2000, [IEEE Engineering Management Society International Engineering Management Conference, 2000 "Leading Technology Change: Management Issues and Challenges"] presented Monday, August 14, 2000 at 9:45am in session 16, Disruptive Technologies: MEMS.

Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Materials Science of Microelectromechanical Systems (Mems) Devices II, M. P. de Boer, A. H. Heuer, S. J. Jacobs, and E. Peeters, eds., Mater. Res. Soc. Proc. Vol. 605. 2000, Materials Research Society: Warrendale, PA. 314 pages.

The impact of solution agglomeration on the deposition of self-assembled monolayers, B. C. Bunker, R. W. Carpick, R. Assink, M. L. Thomas, M. G. Hankins, J. A. Voigt, D. L. Sipola, M. P. de Boer, and G. L. Gulley, Langmuir, 16 7742 (2000).

Surface Micromachine Microfluidics: Design, Fabrication, Packaging, and Characterization, Paul Galambos, William P. Eaton, Randy Shul, Christi Gober Willison, Jeffry J. Sniegowski, Samuel L. Miller, Daniel Gutierrez, presented at the ASME Winter Annual Meeting, Nashville, Tennessee, November 1999.

Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS), Thomas W. Krygowski, Jeffry J. Sniegowski, M. Steven Rodgers, Stephen Montague, James J. Allen, Jerome F. Jakubczak, Samuel L. Miller, presented at Sensors Expo 1999, Cleveland, Ohio, September 14, 1999.

MEMS Design Rule Checking: A Batch Approach for Remote Operation, Presented at the SPIE 5th Annual International Symposium on Smart Electronics and MEMS, March 1-5, 1998, SanDiego, CA, Vol. 3328, pp. 32-39.

Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Selecting a Process Paradigm for an Emergent Disruptive Technology: Evidence for the Emerging Microsystems Technology Base, James H. Smith, Steven T. Walsh, For presentation at the IEEE, International Engineering Management Conference, Oct. 13, 1998.

Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

Improved Polysilicon Surface-micromachined Micromirror Devices using Chemical-mechanical Polishing, Dale L. Hetherington, Jeffry J. Sniegowski, Presented at the International Symposium on Optical Science, Engineering, and Instrumentation, SPIE's 43rd Annual Meeting, San Diego, CA, July 22, 1998.

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. 
I Accept.

Intelligent Microsystems: Strategy for the Future, J. H. Smith, J. J. Sniegowski, P. J. McWhorter, A. D. Romig Jr., Semiconductor International, April 1998, pp. 93-98.

Analyst Perspective: The Coming Revolution in ICs: Intelligent, Integrated Microsystems, A. D. Romig, Jr., J. H. Smith, SEMI Executive Summary Report, Third Quarter 1997, pp. 45-47.

Multi-level Polysilicon Surface-micromachining Technology: Applications and Issues, J. J. Sniegowski, (Invited Paper) ASME 1996 International Mechanical Engineering Congress and Exposition, Proc. of the ASME Aerospace Division, November 17-22, 1996, Atlanta, GA, AD-Vol. 52, pp. 751-759.

Moving the World with Surface Micromachining, J. J. Sniegowski, Solid State Technology, Feb. 1996, pp. 83-90.

Surface Micromachined Sensors and Actuators, J. J. Sniegowski, Micro-integrated Smart Material and Structures Conference (MISMSC), Society for Experimental Mechanics, Williamsburg, VA, Oct. 11-12, 1995, pp. 100-110.

Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices, R. Nasby, J. Sniegowski, J. Smith, S. Montague, C. Barron, W. Eaton, P. McWhorter, D. Hetherington, C. Apblett, and J. Fleming, Proc. Solid-State Sensor and Actuator Workshop, pp. 48-53, Jun. 1996.

Micromachined Sensor and Actuator Research at Sandia's Microelectronics Development Laboratory, J. Smith, Invited Presentation, Proc. Sensors Expo Anaheim '96, pp. 119-123, April, 1996.

Microelectromechanical Systems Research and Development at Sandia, J. Smith, Invited Presentation, GOMAC 1996 Digest, pp. 153-156, Mar. 1996. Received GOMAC Outstanding Conference Paper Award.

Material and Processing Issues for the Monolithic Integration of Microelectronics with Surface-Micromachined Polysilicon Sensors and Actuators. J. Smith, S. Montague, and J. Sniegowski, SPIE Micromachining and Microfabrication `95, vol. 2639, pp. 64-73, Oct. 1995.

Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.  I Accept.

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