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3D Geometry Modeler

The SUMMiT V 3D Modeler is a 3D geometric modeler based on Sandia's new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V baseline surface micromachining process, using low-stress polysilicon as its mechanical material. The resulting 3D model is an accurate representation of the MEMS device, including artifacts like stringers and trapped oxide. The model’s uses include visualization, analysis, dynamic modeling, and rapid prototyping.

A SEM of a
Transmission Gear
A 3D model of a
Transmission Gear

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Contact MEMS at Sandia: memsinfo@sandia.gov

by James J. Allen

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