Sandia MEMS Shortcourses
Sandia offers two short courses to provide information about MEMS applications,
technologies, design, fabrication, and reliability, with an emphasis on the how to
design for the SUMMiT V™ process. Both courses are offered during a one week period, once per year. Course descriptions and sign-up forms are
available below.
For further information regarding the Sandia MEMS Short Courses, please contact
Stephanie Johnson (memscc@sandia.gov).
Introductory Short Course
The Sandia MEMS Introductory Short Course provides a thorough introduction to
MEMS applications, technologies, design, fabrication, characterization, and reliability.
It includes two days of presentations and workshops. One workshop session
introduces participants to SUMMiT™ Process design and layout tools
(based on AutoCAD software). Another workshop introduces participants to device
characterization and testing. Lunches and refreshments are provided throughout the course.
MEMS Design and Reliability Concepts Short Course
The Sandia MEMS Design and Reliability Concepts Short Course equips participants to successfully design MEMS devices to be fabricated in the SUMMiT™ Process while keeping reliability issues in mind. The course also includes discussions of analysis tools and strategies, specific device and component design, fabrication process issues related to design, and issues related to back-end processes such as release etch and packaging.
The Sandia MEMS Design and Reliability Concepts Short Course includes lunches and refreshments each day. During the structured portion, presentations and workshops guide the attendees in designing increasingly complex devices. Attendees have the opportunity to discuss design ideas or designs currently in progress.
The prerequisites are completion of the Sandia MEMS Introductory Short Course, some experience with
AutoCAD software, and interest in designing MEMS devices for the SUMMiT™ Process.
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Design Submission
Pre-Submission Checklist
DRC Error Descriptions 
