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Introductory Shortcourse

The Sandia MEMS Introductory Short Course provides a thorough introduction to MEMS applications, technologies, design, fabrication, characterization, and reliability. The course includes presentations and workshops. One workshop session introduces participants to SUMMiT™ Process design and layout tools (based on AutoCAD software). Lunches and refreshments are provided throughout the course. The following are topics covered during the course:

  • Introduction to MEMS
  • Sacrificial Surface Micromachining
  • SUMMiT V Process Details
  • Sensors and Actuators
  • Advanced Concepts
  • Surface Micromachining Design
  • Introduction to Design Tools
  • Release Processes
  • Performance Analysis and Measurement Methods
  • Reliability Issues in MEMS
  • Microsystems Packaging




Contact MEMS at Sandia: memsinfo@sandia.gov

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