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Micromachined Dynamometer
This micromachined dynamometer is used to determine the coefficient of friction by measuring the normal and tangential forces.
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Dynamometer Beam
The beam shown exerts a normal force on the smooth "gear" of the microengine.
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Flex Link Close-up
The standard microengine flex link is shown here, and is used to rotate the smooth "gear."
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Pin Joint Close-up
This is a close-up look at the pin joint on the smooth "gear."
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Dynamometer Verniers
Verniers for measuring deflection used to calculate the tangential force.
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Vernier Close-up
Close-up of parallel vernier structure.
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Dynamometer Verniers
Verniers for measuring deflection used to calculate the normal force.
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Vernier Close-up
Close-up view of one vernier; the teeth are 2 microns wide and the spaces between them measure 4 microns.
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Contrast of Textures
In this image the texture differences between vertical and horizontal surfaces are visible.
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Contact MEMS at Sandia: memsinfo@sandia.gov
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