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Capabilities



Layout/Design Tools

Layout and Design Tools

The potential of the devices and systems that can be created using MEMS technologies boggles the mind. Because you want to spend your time innovating, we have developed a series of tools to facilitate the design and layout process. These tools are utilized by students while in the short course and are available to the public for a fee.

 

3D Geometry Modeler

The SUMMiT V 3D Modeler is a 3D geometric modeler based on Sandia's new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V baseline surface micromachining process, using low-stress polysilicon as its mechanical material. The resulting 3D model is an accurate representation of the MEMS device, including artifacts like stringers and trapped oxide. The model’s uses include visualization, analysis, dynamic modeling, and rapid prototyping.

A SEM of a Transmission Gear and A 3D model of a
            Transmission Gear
A SEM of a
Transmission Gear
A 3D model of a
Transmission Gear

More information — PDF

System Requirements

The SNL MEMS Design Tools that we include with this CD are designed for use with AutoCAD 2007, 2008, 2009, 2010 or 2011. Note: AutoCad Lite will not work with these tools.

CPU:

Pentium IV or greater

Clock Speed: 3.0 Ghz or greater
Memory:

2 GB Mbytes or greater

Hard Drive:

2 GB free disk space for installation

Operating System:

Windows XP, Vista, or Windows 7

Monitor resolution:

1280 x 1024, 128 MB OpenGL-capable workstation class graphics card

Software:

AutoCAD 2007, 2008, 2009, 2010, or 2011
Microsoft Internet Explorer version 7.0

Price List
Cost Subject to Change without Notice

MEMS Courses

Designing for the SUMMiT V Process using AutoCAD
$1500
Includes course CD

MEMS Software Tools

Sandia MEMS Design Tool Suite
$10000
Includes the following: Sandia Advanced MEMS Design Tools, 2D Process Visualizer, 3D Visualizer, 3D Modeler Generator, Standard Components Library

Fabrication

SUMMIT V Agile Prototyping, US Institutions (200 unreleased modules)
$17,200/design Module
SUMMIT V Agile Prototyping, Non-US Institutions
$Case by Case
(shared reticle) Partnering available for qualifying organizations. Please contact memsinfo@sandia.gov for information.
*Discount available for additional module(s) purchased on same fabrication run
HF Release & Dry - One Batch (approximately 50 modules)
$1500
Release service includes supercritical drying (CO2)
VSAMS Coating
$400/batch (approx. 50 die)
Custom post processing
$Case by Case

MEMS Packaging

Parts designed with standard pad frames, Aluminum Metal and packaged in 24-pin or 48-pin DIP packages
Double or Single SUMMiT Module
Packaging Set up Fee (includes cost of 30 packaged parts)
$3000
___Quartz Lids, taped-on (10 part minimum)
$40/die
___Quartz Lids, sealed (10 part minimum)
$50/die
Custom packages
$Case by Case

MEMS Testing

Testing $2000/day
Super µDriver and Amplifier Design CD
License through TEGAM
Reliability
$1500/day

Additional Service/Technical Support

Custom Design/Design Consulting
$Case by Case
Limited Production
$Case by Case
Custom Development
$Case by Case


Note: Prices are subject to change. Check this site for current pricing. As a National Laboratory, Sandia strives to ensure that all participants have equal opportunities to realize the unique benefits available through our technology programs. We must recover the actual cost of performing work for clients, but do not charge for the research and development programs that produced the technology.
Sandia MEMS Design Tool Suite 2.2.6.1

Sandia's has updated the MEMS Design Tools Suite for university and commercial use.

The suite features include...

  • Optional metal bond pads
  • Compatibility with AutoCAD versions 2010-2013
  • Design templates
  • Component generators
  • An Internet-based design rule checker
  • A virtual 2D cross-section tool
  • A 3D solid model generator Interfaces to FEA analysis programs

The suite's two CDs — Advanced MEMS Design Tools and MEMS Visualization Tools — can now be used with the latest version of AutoCAD. The package also includes enhancements for designing in SUMMiT™, LIGA, and user-specified technologies.

Introduction to Sandia SUMMiT V Design Tools

"SUMMiT V Five Level Surface Micromachining Technology Design Manual" PDF

Design Tool Update Issued 11/1/2012

MEMS Design Tools

Sandia MEMS Visualization Tools 2.2.5

Summit 2D Process Visualizer is a CAD tool. By generating accurate 2D cross sections, a SUMMiT MEMS designer can visualize the results of applying the process sequence to a mask set. The Visualizer extracts the 2D mask layer geometry from an AutoCAD design file through an interactive user interface and constructs a list of polygon edge-crossings.

Features:

  • The SUMMiT V fabrication sequence is reduced to a limited set of process step types to simplify the process simulation.
  • Models for each of the steps are applied sequentially to the list of polygon edge-crossings.
  • The Visualizer users a uniformly gridded model space at a finite resolution.
  • OpenGL graphics display the results within the Windows NT environment.
  • Window controls allow the designer to manipulate the view and step through the process views both forward and backward. Other controls allow the queries of the design space to determine the material type and feature size.
A SEM of a Transmission Gear and A 2D model of a Transmission Gear
A SEM of a
Transmission Gear
A 2D model of a
Transmission Gear

More information — PDF

Visualization Tool Update Issued 11/1/2012

2D-3D Visualization Tools

- Process Definition File Documentation (.pdf)
- MEM File Format Documentation (.pdf)

Note: These tools require AutoCAD versions 2010-2013 (These tools are not supported for previous versions of AutoCAD).

Contact MEMS at Sandia: memsinfo@sandia.gov



MEMS Image Gallery



MEMS Bibliography
MEMS Bibliography



Design Manual …
DRC Error Descriptions
Design Review Checklist



MEMS Bibliography
MEMS Brochure