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SANDIA MEMS

Capabilities



Process Integration & Fabrication

Surface MEMS Micromaching

SUMMiT™
SwIFT™
RF MEMS: AlN & Polysilicon

Slicon Device Technology

3D Photonic Lattice
Passive Waveguide

Bulk Micromachining

Molded Tungsten (MolTun)™

Facilities

MEMS devices are created with processing tools and infrastructure very similar to that used to fabricate conventional integrated circuits. Our advanced MEMS and integrated MEMS (IMEMS) are created in the Silicon Fab (SiFab), part of the Microsystems Engineering Sciences and Applications (MESA) Complex, located at Sandia National Laboratories. The SiFab is a world-class fabrication facility dedicated to providing development and engineering capabilities to support industry, government, and other programs of national interest.

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Microsystems Engineering Sciences and Applications (MESA) Complex

The SiFab has over 30,000 square feet of clean room space and state-of-the-art equipment for processing wafers up to 6 inches in diameter. The laboratory was designed and constructed around 22 separate laminar flow clean room bays, each with an independent air supply. The multiple clean room bays collectively provide over 12,000 square feet of Class 1 clean room space (less than 1 particle 0.5 micron or larger per cubic foot of air).


The modular layout allows a great deal of flexibility in the types of projects that can be performed in the fab. For example, it is possible to perform experimental work in one bay without affecting well-controlled processes in another. The flexible layout also allows the SiFab engineers to work efficiently on many projects that require some degree of isolation, such as benchmarking of advanced process tools, development of state-of-the-art micromachining techniques, and research into materials science and surface chemistries for advanced silicon technology development.


The SiFab's professional staff includes a core of Ph.D. and Master's level engineers and scientists experienced in a broad range of disciplines including microelectronic and micromachining process development, equipment design, materials engineering, device physics, chemical engineering, sensor science, circuit design, computer science, failure analysis, reliability physics, and industrial hygiene.

 

Contact MEMS at Sandia: memsinfo@sandia.gov



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