Employee Locator | Index | Site Map
Home > Mission > ST&E > Microsystems > MEMS > Capabilities

Microsystems Home



Integrated µElectroMechanical Technologies

Sandia develops electro-mechanical devices from concept through delivery for our national security partners


A integrated MEMS ­ electronics, three axis accelerometer, fabricated in the Sandia MEMS first process.

A vibratory gyroscope fabricated in Sandia MEMS first process which enables MEMS and electronics to be fabricated on the same die.

A vertical mirror erected on an rotary indexing stage. The vertical mirror is held in place via hinges and snap springs.

Torsional Ratcheting Actuator A high torque rotary electrostatic actuator

AutoCAD layout shown superimposed on optical image of device. ­ P4 shadow mask required for contact metallization.
Applications include relays, single-bit non-volatile memory storage and TTL output.

Upper polysilicon layer used as a shadow mask for metal deposition. All traces and bond pads are self-shadowed. Allows the use of any metal that can be evaporated.

Relevant Patents

•  Mechanical Reciprocating Tooth Indexing Apparatus , U.S.Patent No. 5,959,376, issued 9/28/1999.

•  Surface Micromachined Counter meshing Gears Discrimination Device, U.S.Patent No. 6,158,297, issued __12/12//2000.

•  Microelectromechanical Dual-Mass Resonator Structure , U.S.Patent No. 6,393,913, issued on May 28, 2002.

•  Surface Micromachined Microfluidic Devices , U.S. Patent No. 6,537,437, Issued 03/25/2003.

•  Planar-Constructed Spatial Micro-Stage , U.S. Patent No. 6,675,671, Issued 01/13/2004.

•  Micromechanical Apparatus for Measurement of Forces , U.S. Patent No. 6,739,201, issued 5/25/2004.

•  Surface-Micromachined Microfluidic Devices , U. S. Patent No. 6,797,187, issued 9/28/2004.

•  Erected Mirror Optical Switch , U.S. Patent No. 6,903,861, issued 6/7/2005.

•  Microelectromechanical Mirrors and Electrically-Programmable Diffraction Gratings Based on Two-Stage Actuation , , __U.S. Patent No. 6,967,757, issued 11/22/2005.

Relevant Papers

•  J. R. Bronson, G. J. Wiens, J. J. Allen, Modeling and Alleviating Instability in a MEMS Vertical Comb Drive using a Progressive Linkage, DETC2005-84217, ASME 2005 International Design Engineering Technical Conferences, September 24-28, 2005, Long Beach, CA.

•  B. Jensen, S. Mutlu, S. Miller, K. Kurabayashi, J. Allen, "Shaped Comb Fingers for Tailored Electro-Mechanical Restoring Force," JMEMS, Vol. 12, No. 3, June 2003.

•  Dagel, DJ; Spahn, OB; Allen, JJ; Kemme, SA; Grossetete, GD; Gass, FR, " Out­of­plane, rotary micromirrors for reconfigurable photonic applications," Proceedings of the SPIE, vol.4983, p.114-21, 2003.

•  B. P. Trease, J. J. Allen, C. C. Wong. M. S. Baker, Design and Analysis of an Out­of­Plane Micro Thermal Actuator, IMECE2003_41393, International Mechanical engineering Congress and Exposition, 15-21 November, 2003, Washington, D. C..

•  R. Osiander, J. Champion, A. Darrin, D. Douglass, T. Swanson, J. Allen, E. Wyckoff, "MEMS Shutters for Spacecraft Thermal Control," NanoTech 2002, Houston, Texas. 9-12 September 2002.

•  Allen, J. J., "Microsystems challenges for engineering education," ASME IMECE Proceedings 2001; vol.2, p.707-710, Nov 11-16 2001.

•  A. Tseng, W. C. Tang, Y. C. Lee, and J. J. Allen, "NSF 2000 Workshop on Manufacturing of Micro-Electro-Mechanical Systems," Journal of Materials Processing and Manufacturing Science, Vol. 8, No. 4, pp. 292-360,April 2000.

•  J. J. Allen, C. W. Dyck, R. J. Huber, J. J. Sniegowski, "High Amplitude Secondary Mass Drive," International Mechanical Engineering Congress and Exposition 2000, MEMS-Vol. 2, 2000.

•  Rodgers, MS; Allen, JJ; Meeks, KD; Jensen, BD; Miller, SL, "Microelectromechanical high-density energy storage/rapid release system," Proceedings of the SPIE, Vol.3876, pp.212-22, 1999.

•  C. W. Dyck, J. J. Allen, R. J. Huber, "Low Voltage Dual Mass Oscillator," International Mechanical Engineering Congress and Exposition, MEMS-vol. 1, pp. 317-323, 1999.

•  C. W. Dyck, J. J. Allen, R. J. Huber, "Parallel-Plate Electrostatic Dual-Mass Resonator," Proceedings of the SPIE, Vol. 3876, pp. 198-209, Sept. 1999.

•  J. J. Allen, R. D. Kinney, J. Sarsfield, M. R. Daily, J. R. Ellis, J. H. Smith, S. Montague, R. T. Howe, B. E. Boser, R. Horowitz, A. P. Pisano, M. A. Lemkin, W. A. Clark, T. Juneau, "Integrated Micro-Electro-Mechanical Sensor Development for Inertial Applications," Position Location and Navigation Symposium, PLANS 98, Palm Springs, Cal., pp. 9-16, April, 1998, also published in IEEE Aerospace and Electronic Systems Magazine, Vol. 13, No. 11, Nov. 1998

• Baker, M.S., de Boer, M.P., Smith, N.F., Warne, L.K. and Sinclair, M.B. "Integrated Measurement-Modeling Approaches for Evaluating Residual Stress Using Micromachined Fixed-Fixed Beams," Journal of Microelectromechanical Systems, Transactions of the IEEE and ASME, vol. 11, No. 6, pp. 743-753, Dec. 2002.

• Plass, R., Baker, M.S. and Walraven, J.A., "Electrothermal Actuator Studies," Proceedings of SPIE, San Jose, CA, vol. 5343, pp. 15-21, January, 2004.

• Walraven, J.A., Plass, R.A., Baker, M.S. and Shaw, M.J., "Failure Analysis of Electrothermal Actuators Subjected to Electrical Overstress (EOS) and Electrostatic Discharge (ESD)," Proceedings from the 30th International Symposium for Testing and Failure Analysis, Worchester, MA, Nov. 14-18, 2004.

• Epp, D.S., Sumali, H., Baker, M.S. and Dyck, C, "Effects of Geometric Features and Gas Pressure on Mechanical Damping of RF Switches," Proceedings of the 15th International Invitational UACEM (Unification of Analytical, Computational, and Experimental Solution Methodologies) symposium: in MEMS and Nanotechnology, Springfield, Massachusetts, pp. 331-337, Oct. 27-29, 2004.

• Baker, M.S., Plass, R.A., Headley, T.J. and Walraven, J.A., "Final Report: Compliant Thermo-Mechanical MEMS Actuators LDRD #52553," Sandia report SAND2004-6635, printed December 2004.

Relevant Books & Book Chapters

•  Micro Electro Mechanical System Design , J. J. Allen, CRC Press, ISBN 0-8247-5824-2, 2005.

•  Chapter 3, Microsystem Fabrication Technologies, J. J. Allen, Micro Electro Mechanical Systems and Microstructures in Aerospace Applications , R. Osiander, A. Darrin, J. Champion, editors, CRC Press, ISBN 0-8247-2637-5, 2005.

•  Chapter 61 Microelectromechanical Systems (MEMS) Sensors for Noise and Vibration Applications, J. J. Allen, Handbook of Noise and Vibration Control , M. J. Crocker, editor, John Wiley Publisher, publication expected 2006.


Contact MEMS at Sandia: memsinfo@sandia.gov

MEMS Image Gallery

MEMS Bibliography
MEMS Bibliography

Design Manual …
DRC Error Descriptions
Design Review Checklist

MEMS Bibliography
MEMS Brochure